Expanding Our Capabilities – MBE at the EQuIP Lab

MBE reactor
We are excited to announce that the EQuIP Lab will soon be equipped with an MBE reactor! This addition will enable us to conduct in-depth material studies for next-generation semiconductor devices and lead us to demonstrate the advancement of semiconductor-based photonic devices.
With this reactor, we will focus on the epitaxial growth of III-V semiconductors, with capabilities to grow Al, In, Ga, As, and Sb on substrates up to 3 inches.

We sincerely appreciate Prof. Wei Guo at UMass Lowell (UML) for their generous donation. The EQuIP Lab team is committed to bringing this tool online as soon as possible at UTA.

For collaboration opportunities, please contact Dr. Seunghyun Jacob Lee.